| WAFER | Tile 1, 3 | Single str. | Other test str. | Data (MS Excel5) |
| C1c-04T [3287-04]
(200microns) |
iv
cv(Tile1) cv(Tile3) |
iv | iv | c1c-04t.xls |
| C1c-05T [3287-05]
(200microns) |
iv
cv(Tile1) cv(Tile3) |
iv | iv | c1c-05t.xls |
| C1c-02S [3289-02]
(280microns) |
iv
cv(Tile1) cv(Tile3) |
iv | iv | c1c-02s.xls |
| C1c-03S [3289-03]
(280microns) |
iv
cv(Tile1) cv(Tile3) |
iv
cv |
iv
cv |
c1c-03s.xls |
| C1c-11S [3289-11]
(280microns) |
iv
cv(Tile1) cv(Tile3) |
iv | iv | c1c-11s.xls |
| C1c-23S [3289-23]
(280microns) |
iv
cv(Tile1) cv(Tile3) |
iv | iv | c1c-23s.xls |
